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Optical Chamber Delivers VUV Laser Beams
November 29, 2005 |Estimated reading time: Less than a minute
HOLLIS, N.H. — J P Sercel Associates (JPSA) has introduced a large-format vacuum UV (VUV) optical chamber for UV excimer laser beam delivery systems that integrates with JPSA's Microtech MBD2 industrial-grade Beam Delivery System (BDS). Lenses, beam-expanding telescopes, beam homogenizers, spacers and other components can be positioned in the chamber and integrated into the BDS using JPSA's universal dovetail mounting system.
A 50 × 50-mm clear aperture allows passage of a larger-diameter homogenized beam without beam corner clipping. Designed for different types of optics mounts with precision adjustments in the X, Y, Z and theta dimensions, the chamber modifies, shapes or expands the UV excimer laser beam through the use of beam-shaping telescopes, beam homogenizers, imaging lenses, condensing lenses and other optics. All are accessible through O-ring sealed removable panels. The chamber also can be used with short-wavelength UV excimer beams, including 157-, 193- and 248-nm.