CyberOptics Showcases Yield-Improving, High-Precision Sensing Solutions at Virtual SEMICON West


Reading time ( words)

CyberOptics® Corporation, a leading global developer and manufacturer of high-precision 3D sensing technology solutions, will participate in the virtual SEMICON West show, July 20-23. During the show, the company will feature its new In-Line Particle Sensor™ (IPS) and Auto Resistance Sensor™ (ARS) for semiconductor tool set-up and equipment diagnostics.

An extension of the industry-leading WaferSense® and ReticleSense® Airborne Particle Sensor (APS) technology that is documented by fabs as the Best Known Method (BKM), the new In-Line Particle Sensor (IPS) with CyberSpectrum™ software detects particles in gas and vacuum lines 24/7 in semiconductor process equipment. The IPS quickly identifies monitors and enables troubleshooting of particles down to 0.1µm.

Process and equipment engineers in semiconductor fabs can speed equipment qualification, shorten equipment maintenance cycles, lower equipment expenses and optimize preventative maintenance plans.

The new WaferSense® Auto Resistance Sensor™ (ARS) with CyberSpectrum™ software for semiconductor tool set-up and diagnostics will be also featured. ARS enables real-time resistance measurements of plating cell contacts in semiconductor Electrochemical Deposition (ECD) applications.

For wafer-level and advanced packaging metrology and inspection, the new WX3000™ system will be highlighted.  Performing two to three times faster than alternate technologies at data processing speeds in excess of 75 million 3D data points per second, the NanoResolution MRS™ sensor-enabled WX3000 systems deliver throughput greater than 25 wafers per hour. 100% 3D and 2D metrology and inspection can be completed simultaneously at high speed, as compared to an alternate, slow method that requires two separate scans for 3D and 2D and only a sampling of a few die.

The proprietary NanoResolution MRS sensor, deemed best in class, meticulously identifies and rejects multiple reflections caused by shiny and mirror-like surfaces. Effective suppression of multiple reflections is critical for highly accurate measurements.

Share

Print


Suggested Items

Happy’s Smart Factory Protocol Primer

04/29/2020 | Happy Holden, I-Connect007
The smart factory concept is built upon data interchange as the foundation. There has been much development in the area of industrial and manufacturing data protocols over the years, stretching back into the 1960s. This article by Happy Holden surveys what are considered the most common protocols in use in the electronics manufacturing industry today, including IPC-CFX/ Hermes, OML, SECS/GEM, and MAPS.

Automation War Stories From ICM Controls

04/22/2020 | I-Connect007 Editorial Team
Members of the I-Connect007 editorial team met with Andy Kadah, president of ICM Controls, and Kevin Jobsky, senior marketing manager, via teleconference on March 20, 2020. Originally, the purpose of our conversation was to discuss factory automation implementation details. Yet, we conducted the interview in the midst of a rapid-fire and wide-ranging onslaught of executive orders from the federal level on down to the local level meant to curb the spread of the coronavirus.

IPC APEX EXPO 2020 Attendees Speak: Camille Sybert

03/13/2020 | I-Connect007 Editorial Team
"There’s a need for flexible solutions, so people are trying to make the most of the equipment that they buy, and they want to have the equipment that’s able to be flexible in scale with what it is that they’re looking for," said Camille Sybert of Nordson Electronics Solutions. "We have customers asking about future capabilities that they might not be ready for right now, but they want to know that it’s something that can be easily integrated into their processes in the future, as they’re in a position to better be able to do so."



Copyright © 2020 I-Connect007. All rights reserved.