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Optical Inspection Station
December 31, 1969 |Estimated reading time: Less than a minute
The SPM ProberStation 150 combines 3-D inspection and modern optical microscopy in a vision inspection system for atomic force microscopy (AFM) and scanning probe microscopy (SPM) studies. Travel area across the motorized stage accommodates samples up to 150 × 250 mm; measurements are said to be highly repeatable at ±200 nm for measuring surface roughness and features.
Built on a granite stage, the station is designed for stability, and to eliminate uncontrolled movement in the Z direction during large movements in the lateral plane. Nano-movements in the X/Y lateral plane do not affect Z-plane stability.
Features include programmable mapping of the lateral plane, automatic shifting between inspection operations using a standard joystick controller, and an integrated optical microscope equipped with Normaski (DIC). It uses manual zoom and manual focal-plane adjustment; optional automatic functions are available. Other options comprise an image-processing module with automatic pattern recognition and programming coordinates for analyzing a series of defined locations. Micro Photonics Inc., Irvine, Calif., www.microphotonics.com.