Matheson Tri-Gas and ATMI Partner to Bring SAGE Gas Sources to Market

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Parsippany, N.J. -- Matheson Tri-Gas Inc., and ATMI Inc. have entered into a manufacturing and distribution agreement for ATMI's SAGE product line for the compound semiconductor market.

This unique product provides a pathway for the industry's first bulk storage supply of consistent, high purity arsine and phosphine for III-V manufacturing. ATMI developed the sub-atmospheric gas storage and delivery technology, beginning with the introduction of its SDS (Safe Delivery Source) product in 1995. ATMI holds 50 U.S. patents related to sub-atmospheric gas storage and delivery.

Matheson Tri-Gas Inc. supports the agreement with more than 75 years of experience in manufacturing, marketing and distributing high purity gases and chemicals, including a leading position as a supplier to the compound semiconductor industry.

For more information on Matheson Tri-Gas Inc., visit For more information on ATMI Inc., visit



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